Abstract
This paper presents an improved infrared position sensitive detector (IRPSD) that is operated in a vacuum condition. IRPSD is a two-dimensional infrared array sensor with two thermometers in each pixel. One thermometer is serially connected in a row and the other is serially connected in a column. The serial connection of these thermometers produces the sum of signals from all pixels in each row and column. With this array architecture, IRPSD extracts specific information without digital image processing. In this study, we developed an IRPSD that uses thermopiles as thermometers. To achieve high responsivity and large signal-to-noise ratio, we optimized the pattern layout of the pixel, considering thermal conductance and Johnson noise. As a result, responsivity of about 170 V/W was obtained.
