Development for 2-axis Electromagnetic Driving MEMS Mirror

Abstract

We propose a new 2- axis electromagnetic scanning mirror that utilizes radial magnetic fields. By positioning magnets under the mirror, we were able to develop a greatly miniaturized mirror device. This device volume is 300 mm³. Moreover, the mirror driving magnetic induction can be enlarged by forming the closed magnetic field with the york and the magnets. To assemble it easily, the upper part of all magnets was assumed to be N pole. To optimize the composition of the yoke and the magnets, the magnetic induction of the space was calculated using magnetic simulation. We made the mirror using the bulk micromachining process, and did the driving experiment. The mirror scanning angle is 10 degrees at 100 mA_P-P for a resonant frequency of 6 kHz, and the frame scanning angle is 1 degree at 100 mA_P-P for a non-resonant frequency of 60 Hz. The calculation and the measurement result were almost the same.