Component Modeling of 2DOF Comb Transducer for Equivalent Circuit Using Built-in Displacement Detection

Abstract

In this paper, we report on a component modeling of in-plane 2DOF comb transducer for equivalent circuit analysis of electrostatic MEMS. The proposed model does not depend on connected components such as voltage sources, external forces, and springs since the model contained a dummy spring that can detect the comb displacement in itself. Using the model, we can analyze not only small-signal ac response but also dc operating points which means that once the parameters are calculated for a comb transducer, we need not to change the model parameters by changing any connected components. This model was adapted to a 2DOF SOI resonator and the measured frequency responses agreed well with the simulated responses.