IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Letter
A Built-in Vibration Sensor Using Arc-Discharged Reactive Ion Plated PZT
Utku BaranMasanao TaniMasahiro AkamatsuYoshiaki YasudaHiroyuki FujitaHiroshi Toshiyoshi
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2011 Volume 131 Issue 3 Pages 128-129

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Abstract

A piezoelectrically excited micro cantilever with multiple electrode ports has been developed as a standard test device to investigate the piezoelectric oscillation sensing capability. A 5 μm thick PZT was deposited by the arc-discharge reactive ion plating on a 20-μm-thick and 2700-μm-long SOI cantilever, and its piezoelectrically measured vibration signal was correlated with the reference oscillation signal from the laser Doppler vibrometer to prove the feasibility as oscillation detector. An equivalent circuit expression for the sensing electrode has been found.

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© 2011 by the Institute of Electrical Engineers of Japan
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