Paper
Preparation of MEMS Thin Film Heater by All Dry Processes and Application to Gas Sensor
2011 Volume 131 Issue 7 Pages 246-250
Details
2011 Volume 131 Issue 7 Pages 246-250
The MEMS thin film heater was prepared by all dry processes and the heating properties of this heater were evaluated. The MEMS heaters were heated up to 400°C at consumed power of a few ten mW. The consumed power for heating was dependent on the heater area and the membrane size. Furthermore, 40 ppm ethanol gas was detected in smaller size and at lower-power consumption by the MEMS gas sensor utilizing this MEMS heater than by the conventional bulk gas sensor.
IEEJ Transactions on Industry Applications
IEEJ Transactions on Electronics, Information and Systems
IEEJ Transactions on Power and Energy
IEEJ Transactions on Fundamentals and Materials
The Journal of The Institute of Electrical Engineers of Japan
The transactions of the Institute of Electrical Engineers of Japan.C
The transactions of the Institute of Electrical Engineers of Japan.B
The transactions of the Institute of Electrical Engineers of Japan.A
The Journal of the Institute of Electrical Engineers of Japan
