A Simulation of MEMS Voltage-Frequency Convertor with Electronic Circuit Simulator

Abstract

An electrostatic micro actuator with an electrical contact between the electrodes is known to show a limit-cycle behavior due to the combination of electrostatic pull-in and release. We newly used an electrical circuit simulator to make an equivalent circuit model to reproduce the limit-cycle by multi-physics simulation. This simulation results were found to explain the experimenntally observed behavior of the developedMEMS voltage to frequency convertor (VFC).