Motion Monitoring of MEMS Actuator with Electromagnetic Induction

Abstract

Previously, we have reported electromagnetically driven 2-axis tilting MEMS mirror, 2-axis tilting grating and 3-axis movable MEMS mirror (2-axis tilting and 1-axis vibration). These devices can be easily actuated by electromagnetic force induced by magnetic potential gradient between planar coils and the magnet. However, this opened loop system can not realize its precise motion control, because of the characteristic deviation of each device, aged deterioration and thermal behavior. This report describes motion monitoring of MEMS actuators with electromagnetic induction for precise motion control. We have confirmed that the theory of motion sensing, we have constructed, agreed with experimental results approximately.