IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Letter
Sputter Deposition of Pb[Zr,Ti]O3 Thin Film onto Pre-Etched Substrate
Kensuke KandaShogo KajimuraJunichi InoueTakayuki FujitaKazusuke Maenaka
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2014 Volume 134 Issue 1 Pages 18-19

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Abstract

This paper demonstrates successful deposition and etching of Pb[Zr,Ti]O3 (PZT) thin films on pre-etched Si substrate with pits having depths of several hundred micrometers. Conventionally, for fabrication of microelectromechanical systems, PZT films are deposited onto a flat substrate because of inherent difficulties associated with stable deposition and processing. We successfully established the fabrication of PZT thin films and electrodes on non-flat and pre-etched substrate by using sputtering deposition and projection exposure techniques. The evaluation results reveal that the PZT thin film deposited onto the pre-etched substrate has good ferroelectric characteristics, including piezoelectric d33 constant of 80 pm/V.

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© 2014 by the Institute of Electrical Engineers of Japan
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