Coupled Analysis of MEMS and Electric Circuits Using Compact Models and Macromodels

Abstract

We report electro-mechanical coupled analysis using compact models and macromodels. Mechanical and electro-mechanical compact models are inserted directly to a circuit simulator. In addition, macromodels for MEMS devices are extracted using Lagrangian-based energy method and the results of finite element (FE) or boundary element (BE) simulations. These models are verified by comparing the results of circuit simulations with those of experiments or FE/BE coupled simulations.