Electrostatic Field Distribution Measurement Using MEMS Micro-mirror Array

Abstract

Electrostatic field distribution measurement using a silicon micro-mirror array fabricated by Micro-Electro-Mechanical Systems (MEMS) process has been presented. The deflection angle of each micro-mirror, which is placed on a spherical surface and is deflected by electrostatic field, was measured optically using a two-dimensional optical scanner and a position sensitive detector (PSD). The obtained electrostatic data showed good agreement with Coulomb's law and the system was applied to measure the electrostatic field distribution of charged substance.