Acceleration Sensors and Angular Rate Sensors (Gyroscopes)

Abstract

This article is dealing with current status and trend of acceleration sensors and angular rate sensors (gyroscopes). Recently, MEMS acceleration sensors and gyroscopes are widely used for consumer electronics, such as cellular phones and digital cameras, as well as equipment in plants and automobiles. In the devices, the cost and size are constantly reduced whereas their performances are increased. In this paper, basics of an acceleration sensor and gyroscope and example structures of them are shown and some trends of the devices are discussed.