Basic Characteristics of Displacement-amplified Dynamic Varifocal Mirror using Mechanical Resonance

Abstract

We have evaluated basic characteristics of a displacement-amplified dynamic varifocal mirror using mechanical resonance. An electrostatically actuated varifocal mirror was fabricated from silicon-on-insulator wafer and glass plate. The estimated displacement amplification of varifocal mirror was approximately 150 by using the mechanical resonance at pressure of 2 Pa. In the displacement amplified state, the beam focusing was confirmed. The confocal measurement was successfully demonstrated using the displacement-amplified dynamic varifocal mirror.