IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Paper
Production and Evaluation of MEMS Gas Sensor by All Dry Processes
Hideya Yamadera, Yasuyuki Kageyama
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Keywords: MEMS, thin film, gas sensor, poly-Si, Pt electrode, Bosch process
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2014 Volume 134 Issue 9 Pages 290-293

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Abstract
The MEMS gas sensor consisted of a poly-Si heater, a SnOx gas sensitive film and Pt/TiN/Ti electrodes was produced by all dry processes and the properties of this sensor were evaluated. 50 ppm ethanol gas was stably detected in smaller size and at lower-power consumption by the MEMS gas sensor than by the conventional bulk gas sensor.
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© 2014 by the Institute of Electrical Engineers of Japan
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IEEJ Transactions on Industry Applications

IEEJ Transactions on Electronics, Information and Systems

IEEJ Transactions on Power and Energy

IEEJ Transactions on Fundamentals and Materials

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