Development of the Rayleigh Type Surface Acoustic Wave Sensor Liquid Phase System Using a Longitudinal Wave Radiation into a Liquid Phase

Abstract

This paper reports the Rayleigh wave sensor using a longitudinal wave radiation into a liquid phase. The sensor using a longitudinal wave radiation of dozens MHz band had been reported, but we have enabled to measure at a high frequency of 197 MHz by confining the sample solution of a few µL in glass groove holder. We have compared the already known longitudinal wave radiation model that varies with the sound velocity in the solution to the measured value of a SAW device that we have developed, reports on the results that led the model of new SAW sensor from the phenomenon that the phase shift caused by the groove opening shape.