Abstract
A silicon microelectromechanical systems (MEMS) resonator array utilizing torsional-to-transverse vibration conversion is designed, fabricated and evaluated. The fabricated resonator array, consisting of two resonators, was measured with an impedance analyzer and compared with the performance in a unit resonator. By compensating for the quality factor decrease in the array, the reduction ratio of the motional resistance in the array was shown to be 1/1.95, which agrees well with the estimated one (1/2). A close set of two resonant frequencies for anti-symmetric and symmetric vibration mode of 78.080 MHz of 78.536 MHz, respectively, were also measured. These resonant frequencies could be successfully switched by changing the polarity of DC bias voltage. This is useful for switching the resonant frequency in resonators for timing and filtering applications.
