Semiconductor Gas Sensors and Catalytic Combustion Type Gas Sensors

Abstract

This review provides materials, configurations, and sensing principles of semiconductor gas sensors and catalytic combustion type gas sensors. Much effort is currently devoted to developing new materials and novel sensing technologies in response to growing demands from society for safety and improved health. MEMS based sensors are especially promising because they can be operated with a small battery making them suitable for wearable and portable instruments. They can also be implemented as multiple array sensors or multi-functional sensors.