Application of the Smart Sensors using Quartz Crystal Microbalance

Abstract

Sensors of quartz crystal microbalance (QCM) based on thin nano scale films for detection of volatile chemicals by utilizing resonance frequency change allow to detect at the trace mass change of the chemicals attached on surfaces of the QCM at nano gram level. Development of the detection film for the QCM sensor is important, because the characteristics of the QCM sensor depend on the structure of the detection film. The detection mechanisms of the QCM sensors are classified into three types as follows: a) direct reaction type, b) hybrid reaction type, c) detection membrane type (increase or decrease system). The recently developed sensors detected volatile chemicals at extremely low concentrations almost independent on temperature and humidity.