IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Paper
Drift Control and Vgs-output Response of High-sensitivity a-InGaZnO TFT pH Sensors
Shinnosuke IwamatsuYutaka AbeShunsuke KonnoMutsuto KatohKazushige TakechiHiroshi Tanabe
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2017 Volume 137 Issue 3 Pages 89-94

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Abstract

Amorphous indium-gallium-zinc oxide thin-film transistor based pH sensors utilizing a top-gate effect exhibit a high pH sensitivity beyond the Nernst theoretical limit. In this paper, we optimize the sequence for operating these sensors, and evaluate gate-to-source voltage (Vgs) response to small pH step variations. An intermittent operation obviously suppresses the long-term drift. As a result, the a-InGaZnO TFT pH sensor with the sensitivity of 450 mV/pH shows linear Vgs response to a pH step change of 0.1.

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© 2017 by the Institute of Electrical Engineers of Japan
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