Micro-Watt Order Power Generation by Miniaturized Energy Harvester using Coatable PVDF Piezoelectric Thin Film

Abstract

This paper describes the fabrication and characterization of a vibration energy harvester (VEH) using polyvinylidene fluoride (PVDF) film which is solution based piezoelectric polymer. The PVDF film with thickness of 30 µm was coated on phosphor bronze cantilever (thickness: 100 µm, length: 25 mm, width: 15 mm), and was polarized by applying electrical field. Then, Al thin film was deposited on the PVDF film as an upper electrode. When the fabricated VEH was vibrated by a vibration test system with the resonant frequency of 55 Hz and acceleration of 17 m/s², maximum output power of 4.3 µW was obtained.