2017 Volume 137 Issue 6 Pages 152-158
In this paper, we report on a proof-of-concept level energy harvester device that could earn electric power of 0.093 µW/cm2 by the fluidic motion in a PDMS (polydimethylsiloxane) micro fluidic channel placed on a silicon substrate with built-in permanent electrical charges or so-called electrets. Targeting implantable medical devices such as respiratory pace-maker, the heart beat or aspiration is thought to be the source of motion as a final shape of the energy harvesting system.
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