Tactile Device Based on Piezoelectric MEMS by Using a Polymer/PZT Laminated Structure

Abstract

Novel miniaturized tactile devices, which provide a person with vibration stimulation, are proposed. The strategy is to hit the skin with a resonantly oscillating proof mass. The tactile devices consist of a Si proof mass and a beam formed by laminated thin-film PZT and polymer. The fabricated devices generated large displacement with high durability. Tactile experiments suggest that all examinees experienced vibration at displacement of 1.3 mm for a 4 mm × 4 mm device. For wearable monitoring systems of human activities, the energy consumption was estimated at 12 µW and the major energy loss was attributed to dielectric loss.