IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Paper
Study on NH3 Gas Sensors using a WO3-based Multiple-layered Thin Film with Pt Catalyst
Tsubasa MoritaKoji SanoTomiharu YamaguchiKazuhiro Hara
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2018 Volume 138 Issue 10 Pages 471-476

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Abstract

NH3 gas is a poisonous substance that adversely affects the environment and humans. A low level NH3 is created by human bodies and emitted as a component of urine and exhaled breath. Therefore, the detection of NH3 gas is important to monitor human health conditions. A novel WO3 multiple-layered thin film NH3 sensor using Pt catalyst has been developed in this study. WO3 thin film coated with Pt nanoparticles successfully improves the sensitivity to NH3 gas. Furthermore, WO3 multiple-layered thin film with an interspace has the effect of enhancing the sensitivity and lowering the optimum operating temperature. The developed sensor can detect as low as 1 ppm NH3 gas.

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© 2018 by the Institute of Electrical Engineers of Japan
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