2018 Volume 138 Issue 7 Pages 294-300
The author investigated gauge factors (Gf) of Cr-Al-N thin films in high temperature range. As a result, it was found that the thin film showed a uniform and high Gf of about 8 over the temperature range from -50℃ to around 350℃. It was considered that the films were able to be expected as high sensitive strain sensors to use in high temperature range.
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