2018 Volume 138 Issue 8 Pages 365-369
We have fabricated a silicon MEMS resonator aiming at multi-modal sensors, and evaluated vibration characteristics by electromagnetic drive and induced electromotive force detection. The resonance frequency of the driving voltage of 0.6 Vpp shows torsional vibration of approximately 87 kHz, and the resonance frequency is shifted toward the low frequency side as the driving voltage increases. Resonance characteristics due to temperature change and thin film stress were evaluated.
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