Impact Test for Ensuring Reliability of Gas Sensors Using Large Particle Size-Zeolite

Abstract

To make high-selective and sensitive gas sensors, embedding zeolite particle to MEMS structures is studied. However, if the zeolite is aggregated, the zeolite structures become fragile and fall off from large MEMS structures. In this paper, we propose covering the aggregated zeolite particle embedded in micro-trenches with thin crystalline zeolite films. This integration method can be used for other powder form materials, like MOFs and quantum dots. In addition, we investigate the impact effects to the three kinds of zeolites (FAU, LTL, and MFI) with and without the thin zeolite films.