An Impedancemetric Micro NO₂ Sensor Using Oxide and Solid-Electrolyte Thin-Films

Abstract

A solid-state micro NO_X sensor was tried to make using a solid-electrolyte Li_1.5Al_0.5Ti_1.5(PO₄)₃ (LATP) thin-film as an impedance transducer and a perovskite-type oxide thin-film as a receptor, respectively. The LATP and perovskite-type La_0.8K_0.2MnO₃ oxide thin-films were prepared by wet-chemical methods at 650-800°C. The La_0.8K_0.2MnO₃/LATP thin-film device could work as a good impedancemetric NO₂ sensor at 300-500°C.