Paper
Se/Ga2O3 Micro Photodiodes on Flexible Film for Visible Light Sensing
2020 Volume 140 Issue 12 Pages 363-368
Details
2020 Volume 140 Issue 12 Pages 363-368
In this paper, Ga2O3/Se heterojunction photodiodes at a thickness of less than 1 µm are patterned on a transparent polyimide film. Photodiode patterns enabled simultaneous and multi detection of light intensity. Tiny, light- weight, and flexible features of the developed sensors are also attractive for practical applications such as sensors for wearable and/or robotics systems. Above-mentioned sensors can be attached onto even non-flat surfaces of human finger and/or movable parts of robotic systems. The details of film growth processes and patterning of Ga2O3/Se photodiodes on a polyimide film are also discussed.
IEEJ Transactions on Industry Applications
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IEEJ Transactions on Fundamentals and Materials
The Journal of The Institute of Electrical Engineers of Japan
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The transactions of the Institute of Electrical Engineers of Japan.B
The transactions of the Institute of Electrical Engineers of Japan.A
The Journal of the Institute of Electrical Engineers of Japan
