IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Special Issue Letter
Highly Stretchable Vertical-wavy Cu Interconnects Fabricated by a Micro-corrugation Machine and a Pre-stretched Silicone Rubber Substrate
Shinji OkudaMichitaka YamamotoSeiichi TakamatsuToshihiro Itoh
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2020 Volume 140 Issue 7 Pages 186-187

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Abstract

We have developed a new fabrication method of stretchable interconnects using a micro-corrugation machine and a pre-stretched silicone rubber substrate. The fabricated interconnects exhibited >200% stretchability, and their electric resistance was lower than 1 Ω/cm even under the stretch condition. Finally, the stretchable LED circuit with our micro wavy Cu interconnects was demonstrated.

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© 2020 by the Institute of Electrical Engineers of Japan
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