IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Special Issue Paper
A Method to Optimize the Output Power of MEMS Vibrational Energy Harvester
Hiroyuki MitsuyaHisayuki AshizawaNoriko ShimomuraHiroaki HonmaGen HashiguchiHiroshi Toshiyoshi
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2021 Volume 141 Issue 7 Pages 245-253

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Abstract

A MEMS vibrational energy harvester is developed as a power source for infrastructures monitoring systems. The output power is maximized by appropriately choosing the load resistance in accordance with the vibration conditions of the vibration source. Output power of more than 500 µW is obtained from the vibrations caused by a vacuum pump used in a factory.

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© 2021 by the Institute of Electrical Engineers of Japan
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