Development of Quartz Crystal Complex Capacitive Sensor with Microelectrode Array for Sensitization

Abstract

In this paper, we report a development of quartz crystal complex capacitive sensor with microelectrode array for local detection of liquid sample. This sensor is composed of the sensing capacitor (SC) with microelectrode array and quartz crystal resonator (QCR). It is a contactless capacitive sensor using out-of-plane electric field of a planer sensing capacitor. We succeeded in confining the electric field by placing microelectrode array on the SC and improving the spatial resolution of the sensor. This sensor enables local capacitive detection of target materials. This sensor is expected to be applied to the detection system of µ-TAS.