Tactile Sensor with Microcantilevers Embedded in Fluoroelastomer/PDMS for Physical and Chemical Resistance

Abstract

This paper addresses physical and chemical resistance evaluation of tactile sensors. We have developed cantilever-type MEMS tactile sensors embedded in the elastomer. In this work, we used a combination of silicone elastomer with excellent mechanical properties and fluoroelastomer with excellent chemical resistance. As a new embedding method for the sensor, we devised a method of embedding with PDMS with low creep and coating with a fluoroelastomer for surface protection. We further performed three evaluations to demonstrate the physical and chemical resistance of sensors. Consequently, using the devised method, we have demonstrated that the sensor with both physical and chemical resistance are feasible.