Stress Concentration Relief Structure Using Micro-Loading Effect for Cantilever Beam Vibration Energy Harvesters

Abstract

This paper proposes the stress concentration relief fillet of the MEMS cantilever piezoelectric energy harvester (PEH). Stresses at the sharp corner of the beams are quite high due to concentrated stresses, and lead to fracture. We developed a cantilever with the fillet structures using the micro-loading effect. Compared to the typical cantilever PEH, the fracture strength of the beam doubled due to the fillets.