Fabrication of Micro-Cantilever Beams Using Anodic Oxidized Aluminum

Abstract

A new fabrication process of micromachines using anodic oxidized aluminium film has been developed. The aluminium oxide film was made by anodizing evaporated aluminium in H₂SO₄ solution with a constant voltage. For examples, a cantilever beams have been fabricated which is deflectable by electrostatics. And the Yong's modulus is determined from the resonance frequency of these beams, E=327GPa. From these results, we therefore conclude that anodic oxidized aluminium film is a good material of micromachines.