IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Scope for Micromachining Multi-Chip Service in Japan
Susumu Sugiyama
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Keywords: MEMS
JOURNAL FREE ACCESS

1996 Volume 116 Issue 6 Pages 209-212

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IEEJ Transactions on Industry Applications

IEEJ Transactions on Electronics, Information and Systems

IEEJ Transactions on Power and Energy

IEEJ Transactions on Fundamentals and Materials

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The Journal of The Institute of Electrical Engineers of Japan
IEEJ Transactions on Fundamentals and Materials
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IEEJ Transactions on Electronics, Information and Systems
IEEJ Transactions on Industry Applications
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IEEJ Transactions on Electrical and Electronic Engineering
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