Historical Perspective of Accelerometer Technologies

Abstract

Summarising, piezoresistive accelerometers can have a high dynamic range, in combination with a sufficiently high resonance frequency for modal analysis applications. The resolution that can be obtained in practice is expected to be sufficient, when using a low noise measurement amplifier, that can handle the DC response of the accelerometer. A drawback of piezoresistive detection is the temperature sensitivity, although effective temperature compensation schemes have been developed.