A Reforming Technique with Ion Implantation for Polycrystalline Silicon Microstructures

IEEJ Transactions on Sensors and Micromachines

Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939

A Reforming Technique with Ion Implantation for Polycrystalline Silicon Microstructures

Yukihiro Takeuchi, Kazuhiko Kano, Makiko Fujita, Kenichi Ao, Yoshinori Ohtsuka, Shigeyuki Akita, Tadashi Hattori

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1996 Volume 116 Issue 7 Pages 303-304

DOI https://doi.org/10.1541/ieejsmas.116.303

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