A trial fabrication of micro structures by ultra precision cutting

Formation of micro spiral electrode

Abstract

A new fabrication method for electrostatic actuators is proposed. This method uses precision cutting technique to fabricate minute grooves which will be filled up with electro-plated metal layer to from fine three phase electrodes. Two types of sample electrodes with 40 micrometer pitch are fabricated on the surface of cylinders of 10mm diameter polyimide. One of the fabricated electrode was able to drive insulating fluid by applying pulse voltages. Though there were some defects on those electrodes, the breakdown voltage was as high as 1000V, which shows the potential ability of this fabrication method.