Fabrication Technologies of Inorganic Functional Thin Films for Sensors and Actuators

IEEJ Transactions on Sensors and Micromachines

Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939

Fabrication Technologies of Inorganic Functional Thin Films for Sensors and Actuators

III. Deposition and Evaluation of PZT Thin Film Using ECR Sputtering

Kuniki Ohwada, Katsuhiko Tanaka, Ryuichi Kubo

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JOURNAL FREE ACCESS

1997 Volume 117 Issue 10 Pages 497-500

DOI https://doi.org/10.1541/ieejsmas.117.497

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