Preparation of Piezoelectric Thick Films by Jet-Printing-System Method

Abstract

Pb (Zr, Ti) O3 piezoelecteric thick films have been prepared on Pt/Cr/SiO2/Si by means of an improved jet printing system (JPS). X-ray diffraction (XRD) and scanning electron microprobe (SEM) analysis and measurements of electrical properties including dielectricity, ferroelectricity and piezoelectricity have been carried out on films. A very high depossition rate of 3μm/min and films with thickness above 100μm have been obtained without peeling. However, the films prepared in this fasion demonstrate lower piezoelectric behavior than bulk PZT ceramics. The reason for this has been explored by using element analysis.