Abstract
Al and PZT{Pb(Zr, Ti)O3} were directly bondable by forming hydrogen bonds at the interface. The strength of the bond and the structure of the interface were investigated. This technique was applied to the direct bonding between a PZT stacked actuator and an Al radiator plate on an in-pipe micro inspection machine, and the heat transmission effects of direct bonding on the micro inspection machine have been compared with the adhesive bonding.
First, the Al and the PZT were treated so that their surfaces were hydrophilic, then OH groups were adsorbed by a physical reaction in which the surfaces are bombarded with ions produced by passing the steam through anion source. The surfaces were then placed in contact with each other in the air, then heated above 250°C in a vacuum to remove the residual water molecules from the bonding interface.
The observation with a thermo-viewer shows that the saturated temperature of the PZT stacked actuator at the driving frequency of 1kHz is suppressed below 93°C by the direct bonding of the Al radiator plate as compared with 110°C of adhesive bonding. Walking speed of the in-pipe micro inspection machine which utilizes the direct bonding was successfully stabilized compared with the adhesive bonding.
