IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Infrared Light Source Made of Single Crystal Silicon Microbridge
Shiro KarasawaSeishiro OhyaHiroyasu YuasaKenji AkimotoSetsuo Kodato
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1997 Volume 117 Issue 5 Pages 239-242

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