IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Fabrication and Experiment of Planar Micro Ion Drag Pump
Si-Hong AhnYong-Kweon Kim
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1998 Volume 118 Issue 5 Pages 255-259

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Abstract
A micro ion drag pump with planar electrodes on a glass substrate is fabricated and tested. The pump consisted of a 2-dimensional electrode pair array is driven by DC voltage using unipolar conduction. Ethyl alcohol is pumped in both directions, and the flow rate and the pressure are measured, in channels of depth 100μm or 200μm and width fixed at 3mm. It is found that the pump could be fabricated easily and at lower cost than the micro ion drag pumps previously investigated.
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© The Institute of Electrical Engineers of Japan
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