IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Cross Type PSD Sensor for Position Error and Rotation Angle of Target Hole
Soichiro HayakawaNuio TsuchidaKoji ImaiAsao Tanaka
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1998 Volume 118 Issue 6 Pages 339-340

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© The Institute of Electrical Engineers of Japan
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