Active Catheter Using Multi-Link-Joint Structure Fabricated in Silicon Wafer

Abstract

An active catheter using silicon multi-link-joint structure has been developed. This catheter has a function of controllable bending motion like a snake by incorporation of distributed shape memory alloy (SMA) coil actuators and restoring silicon springs. The mechanical structure that consists of links and connecting bendable beams was fabricated in silicon wafers by using bulk micromachining technique. This method has an advantage that plural catheters can be fabricated by batch process.