IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Delta-Sigma Modulation Sensor Interface Circuits with Improved Conversion Gain for Capacitive Readout Chemical Sensors
Shoji KawahitoAndreas KollChristoph HagleitnerHenry BaltesYoshiaki Tadokoro
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1999 Volume 119 Issue 3 Pages 138-142

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Abstract
This paper presents improved capacitive readout type sensor interface circuits designed for CMOS integrated chemical sensors. The sensor is fabricated using a 0.8μm CMOS IC process technology. Volatile organic compounds (VOCs) are detected by measuring the capacitance change of polymer coated interdigital capacitors due to analyte absorption. The delta-sigma modulation sensor interface uses a sensor capacitor and a reference capacitor as those for the input of the frontend switched capacitor integrator. An improved capacitance sensing scheme is proposed to improve the sensitivity.
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© The Institute of Electrical Engineers of Japan
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