Characteristics of Optical Devices Integrated with Micromechanical Devices Using Spot-size Converted LD

Abstract

A new integration scheme using spot-size converted waveguide devices is presented for use with highly tunable opto-micromechanical devices. A typical application would be for use with an external cavity laser: tunability can be greatly improved by employing a spot-size converted laser diode (SS-LD) with large beam divergence. The feasibility was confirmed theoretically for a typical SS-LD with spot size of 3μm, and its experimental verification was performed with a device fabricated on a comb-drive micromirror.