IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Delay-Msking Process for Silicon Three-Dimensional Bulk Structures
Makoto MITA, Yoshio MITA, Hiroshi TOSHIYOSHI, Hiroyuki FUJITA
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Keywords: ICP-RIE
JOURNAL FREE ACCESS

1999 Volume 119 Issue 5 Pages 310-311

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IEEJ Transactions on Industry Applications

IEEJ Transactions on Electronics, Information and Systems

IEEJ Transactions on Power and Energy

IEEJ Transactions on Fundamentals and Materials

The Journal of The Institute of Electrical Engineers of Japan

The transactions of the Institute of Electrical Engineers of Japan.C

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IEEJ Transactions on Fundamentals and Materials
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IEEJ Transactions on Electronics, Information and Systems
IEEJ Transactions on Industry Applications
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IEEJ Transactions on Electrical and Electronic Engineering
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