A hysteresis movement analysis of micro-cantilever with constant bending moment driven by electro-static force

Abstract

Bending processes of micro-cantilevers with constant bending moment driven by electro-static force are investigated and analyzed theoretically by using finite-difference method (FDM), Newton's method and bisection method. In this analysis, a mode boundary chart is introduced to illustrate boundaries of some deformation modes, which are categorized by the contact situation between the cantilever and an electrode substrate. From the mode boundary chart, existence of hysteresis movement of the cantilever is predicted and transition processes of deformation modes are analyzed. To confirm the usefulness of the theoretical analysis, micro-cantilevers are fabricated and cantilever's deformation curves are observed experimentally at various applied voltages. As a result, the deformation curves of cantilevers demonstrate the usefulness of the theoretical predictions.