Measurement of heat transfer in micro-bridge heater

Abstract

For the design of thermal sensor, heat transfer in a micro-bridge heater should be revealed. The power input is measured as a function of temperature rise both in air and in vacuum to separate the heat transfer through air. The ratio of the transfer through air to the other transfer is investigated as a function of the heating area. The result indicates that the transfer through air is proportional to the area, and the transfer though air on the beams is separated.