Abstract
We produced a new vibrating gyroscope using a parallel beam structure. This gyroscope has some following sigunificant features, (1) The sensor device does not interfere to the reference vibration of the drive device. (2) This structure can convert the small Coriolis force into large concentrate strain, (3) Resonance frequency of the drive unit and the sensor unit can be easily adjusted by changing the mass of the tip. (4) Mechanical coupling can be suppressed by applied voltage to sensor device. However, this gyroscope is unsuitable for the mass-production, since the structure is complicated.
In this paper, we solve this problem by the presswork and the hydrothermal method. We optimized of the parallel beam gyroscope for the presswork based on the FEM analysis, and put PZT thin films by the hdyrothermal method. Using these two methods, we produced the dangler type gyroscope suitable for the mass production of a small size gyroscope with the advantage of the parallel beans structure.
